JPH0514430B2 - - Google Patents
Info
- Publication number
- JPH0514430B2 JPH0514430B2 JP56081416A JP8141681A JPH0514430B2 JP H0514430 B2 JPH0514430 B2 JP H0514430B2 JP 56081416 A JP56081416 A JP 56081416A JP 8141681 A JP8141681 A JP 8141681A JP H0514430 B2 JPH0514430 B2 JP H0514430B2
- Authority
- JP
- Japan
- Prior art keywords
- polysilicon
- single crystal
- isolation
- silicon single
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
Landscapes
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56081416A JPS57196579A (en) | 1981-05-28 | 1981-05-28 | Sos/mos transistor and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56081416A JPS57196579A (en) | 1981-05-28 | 1981-05-28 | Sos/mos transistor and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57196579A JPS57196579A (en) | 1982-12-02 |
JPH0514430B2 true JPH0514430B2 (en]) | 1993-02-25 |
Family
ID=13745737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56081416A Granted JPS57196579A (en) | 1981-05-28 | 1981-05-28 | Sos/mos transistor and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57196579A (en]) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59184567A (ja) * | 1983-04-05 | 1984-10-19 | Nec Corp | 透明基板上の半導体デバイスの製造方法 |
JPH05166919A (ja) * | 1991-12-18 | 1993-07-02 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5229157A (en) * | 1975-09-01 | 1977-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Timer circuit |
JPS5816619B2 (ja) * | 1978-05-25 | 1983-04-01 | 工業技術院長 | 半導体装置の製造方法 |
-
1981
- 1981-05-28 JP JP56081416A patent/JPS57196579A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57196579A (en) | 1982-12-02 |
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